Process for preparing an optical waveguide component from acrylate/titanium alkoxide composite material and the prepared optical waveguide component
US6852358B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 28, 2003 |
| Grant date | Feb 8, 2005 |
| Priority date | — |
| Expiry date | Aug 28, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/1221
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention relates to a process for preparing an optical waveguide component from acrylate/titanium alkoxide composite material, which is characterized by using an acid-free sol-gel process to prepare a precursor solution of acrylate/titanium alkoxide composite film, then coating the precursor solution on a silicon wafer then drying, and producing the optical waveguide component having channels by using a lithography process. The present invention also relates to an optical waveguide component of acrylate/titanium alkoxide composite material, the material has excellent transparency and its refractive index varies with the amount of titanium alkoxide contained therein. When an optical waveguide component is prepared from the composite the reduction of near-infrared ray is less than 0.7 dB/cm and therefore the waveguide component is advantageous for use as an optical communication element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.