Scanning using position transmission for triggering the recording of measured values

US6853459B2 · kind B2 · utility

Assignee

• Nanofocus AG · KR

Inventors

• Jürgen Valentin · Duisburg, DE
• Marcus Grigat · Wesel, DE
• Hans-Hermann Schreier · Duisburg, DE

Key dates

• Filing date: Jan 11, 2001
• Grant date: Feb 8, 2005
• Expiry date: May 18, 2021

Classification

• Technology area (CPC G): Physics
• CPC primary: G01B21/30
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The start of the displacement movement is initiated by a software instruction when measuring surface topologies with microscopic resolution. Trigger pulses which serve to trigger the recording of measured values on the sensor are generated in discrete local intervals by a position transmitter. The measured values obtained are stored and then asynchronously transmitted to the controller.