Patent · US Expired

Open-loop for waveform acquisition

US6853941B2 · kind B2 · utility

4Cited by
3References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 30, 2002
Grant dateFeb 8, 2005
Priority date—
Expiry dateApr 30, 2022

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01R31/305
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Methods and apparatus, including computer program products, implementing and using techniques for open-loop waveform acquisition. In general, in one aspect, the invention provides a method for open-loop waveform acquisition. The method includes acquiring an S-curve of an acquisition loop of an electron-beam probe system. The S-curve represents a response of the acquisition loop to changes of potential differences between the acquisition loop and a device under test. The method includes calibrating the acquisition loop to obtain a linear region in the acquired S-curve and using the linear portion of the acquired S-curve to calculate voltage at a probe point of the device under test.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.