Vehicle for transporting a semiconductor device carrier to a semiconductor processing tool
US6857841B2 · kind B2 · utility
2Cited by
10References
6Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 27, 2003 |
| Grant date | Feb 22, 2005 |
| Priority date | — |
| Expiry date | Mar 27, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/14
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A vehicle for transporting semiconductor devices is used for servicing loadports of semiconductor processing tools with device carriers by use of a portal hoist. Thereby, the vehicle contains an empty inner space and an open front side, such that the loadport is enclosed by the vehicle, when it approaches and docks to the loadport. Time for loading is shortened, complexity of structure and procedure is reduced and cleanroom space is saved.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.