Fuse structure window
US6858913B2 · kind B2 · utility
2Cited by
4References
24Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 30, 2003 |
| Grant date | Feb 22, 2005 |
| Priority date | — |
| Expiry date | Apr 30, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention provides a fuse structure. The fuse structure comprises a substrate, a plurality of conductive layers, a plurality of dielectric layers and a plurality of conductive plugs. The novel fuse structure includes a plurality of fuse units, and a new layout of the fuse units to increase the pitch between the fuse units, preventing the fuse structure from failing when misalignment of the laser beam and thermal scattering of the laser beam damage the second layer of the fuse structure in the laser blow process, thus increasing reliability and yield.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.