Method for ascertaining position values, and scanning microscope
US6859294B2 · kind B2 · utility
1Cited by
7References
23Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 5, 2002 |
| Grant date | Feb 22, 2005 |
| Priority date | — |
| Expiry date | Sep 5, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/0048
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A scanning microscope is disclosed. The scanning microscope comprises a light source which emits an illuminating light beam for illumination of a specimen, a resonant beam deflection device, for guiding the illuminating light beam over the specimen, which has a resonant frequency and a resonant frequency range, and an independent oscillator with which a drive oscillation, which has a drive frequency within the resonant frequency range can be generated which drives the beam deflection device. Furthermore a method is disclosed for controlling a scanning microscope having a resonant beam deflection.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.