Device for detecting three-dimensional electromagnetic radiation and method for making same
US6861719B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 6, 2001 |
| Grant date | Mar 1, 2005 |
| Priority date | — |
| Expiry date | Dec 14, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/3025
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device for detecting electromagnetic radiation including at least one detection circuit including a non-cooled thermal detector and an associated reading circuit, and a method for producing the device. The device includes a substrate forming a cavity under vacuum, in which are placed the thermal detector and the reading circuit. A window transparent to radiation is placed above the cavity and ensures the sealing of the cavity. A sealing mechanism hermetically attaches the window on the substrate, and an electrical connection is inserted in the window ensuring a leaktight connection between the detection circuit and processing elements outside the cavity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.