Method for increasing the measurement information available from a transmission electron microscope and a transmission electron microscopy device
US6864483B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 20, 2001 |
| Grant date | Mar 8, 2005 |
| Priority date | — |
| Expiry date | Feb 20, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/852
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
This invention relates to a method for increasing the measurement information available from a transmission electron microscope, said information relating to a measurement sample, comprising the step of: including, in said transmission electron microscope, an atomic force microscopy device. This invention also relates to a transmission electron microscopy device, characterised in that a transmission electron microscope is combined with an atomic force microscope, positioned within said transmission electron microscope. Finally, the invention relates to a device for insertion in a transmission electron microscope, characterised in that said device comprises an atomic force microscopy device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.