Method for operating a microelectromechanical system using a stiff coupling
US6864618B2 · kind B2 · utility
48Cited by
9References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 17, 2003 |
| Grant date | Mar 8, 2005 |
| Priority date | — |
| Expiry date | Oct 17, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02N1/008
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A microelectromechanical system is disclosed that uses a stiff tether between an actuator assembly and a lever that is interconnected with an appropriate substrate such that a first end of the lever may move relative to the substrate, depending upon the direction of motion of the actuator assembly. Any appropriate load may be interconnected with the lever, including a mirror for any optical application.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.