Management system of monitor wafers
US6865434B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 25, 2003 |
| Grant date | Mar 8, 2005 |
| Priority date | — |
| Expiry date | Dec 25, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A management system for managing information of monitor wafers stored in a storage center includes an operation rule module for determining the next manufacturing process for each of the monitor wafers according to its wafer number and wafer condition, an information update module for updating the information of the monitor wafers in a database according to the results made by the operation rule module, an inventory module for computing an inventory quantity of the monitor wafers according to the wafer numbers and the wafer conditions of the monitor wafers, a warning module for checking whether the inventory quantity of the monitor wafers is less than the quantity of the safety stock or not and sending a warning message when the inventory quantity of the monitor wafers is less than the quantity of the safety stock, and a display module for showing the wafer conditions and the inventory quantity of the monitor wafers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.