Fixture for assembling a post-CMP cleaning brush
US6865764B2 · kind B2 · utility
2Cited by
1References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 16, 2002 |
| Grant date | Mar 15, 2005 |
| Priority date | — |
| Expiry date | May 11, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/53657
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A fixture for assembling a post-CMP cleaning brush. The post-CMP cleaning brush is provided with a brush core and an outer brush, and the outer brush is provided with a hollow portion. The fixture comprises a base, a plurality of posts and a guiding member. The base is provided with a plurality of holes. The posts insert into the holes of the base through the hollow portion of the outer brush respectively so as to assist the brush core in passing through the hollow portion of the outer brush. The guiding member is connected with the brush core to assist the brush core in passing through the hollow portion of the outer brush.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.