Polishing tool and polishing apparatus
US6866565B2 · kind B2 · utility
0Cited by
5References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 29, 2003 |
| Grant date | Mar 15, 2005 |
| Priority date | — |
| Expiry date | Jan 29, 2023 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24D3/28
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A polishing tool is used for polishing a workpiece in a state such that the workpiece is pressed against and brought into sliding contact with the polishing tool. The polishing tool is formed of thermoplastic resin having an average glass transition temperature (Tg) ranging from 270 K to 400 K. The thermoplastic resin includes a first phase having a low glass transition temperature (Tg) of 320 K or lower within a range of from 10 weight % to 90 weight %, and a second phase having a high glass transition temperature (Tg) of 320 K or higher within a range of from 90 weight % to 10 weight %.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.