Supporting structure of optical element, exposure apparatus having the same, and manufacturing method of semiconductor device
US6867848B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 27, 2001 |
| Grant date | Mar 15, 2005 |
| Priority date | — |
| Expiry date | Sep 21, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70891
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A supporting structure for supporting an optical element. The supporting structure includes a first supporting member for supporting the optical element, a second supporting member arranged in an outer diameter side of the first supporting member for supporting the first supporting member, and an elastic member placed between the first supporting member and the second supporting member in the radial direction of the optical element. The inner diameter side of the elastic member is connected to the first supporting member while an outer diameter side of the elastic member is connected to the second supporting member. The elastic member is elastically deformable in the radial direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.