Yuji Sudo
5Patents
3h-index
15Co-inventors
50Inventor score
Filing activity: Nov 21, 1997 → Aug 22, 2014
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6122114A | Optical-element supporting device and optical apparatus | Physics | 29 | Expired |
| US6867848B2 | Supporting structure of optical element, exposure apparatus having the same, and manufacturing method of semiconductor device | Physics | 22 | Expired |
| US7113263B2 | Supporting structure of optical element, exposure apparatus having the same, and manufacturing method of semiconductor device | Physics | 4 | Expired |
| US7313800B2 | Disk centering system | Physics | 2 | Expired |
| US9751632B2 | Movement unit | Mechanical Engineering; Lighting; Heating | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.