Patent · US Expired

Method for real-time control of the fabrication of a thin-film structure by ellipsometric measurement

US6868312B2 · kind B2 · utility

0Cited by
6References
33Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 6, 2001
Grant dateMar 15, 2005
Priority date—
Expiry dateFeb 20, 2022

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N2021/213
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Method for real-time control of the fabrication of a thin-film structure comprising a substrate by ellipsometric measurement in which:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.