Ultra-miniature optical pressure sensing system
US6868736B2 · kind B2 · utility
81Cited by
3References
10Claims
0Family size
Assignee
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Key dates
| Filing date | Feb 21, 2003 |
| Grant date | Mar 22, 2005 |
| Priority date | — |
| Expiry date | Mar 19, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3855
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The fiber optic pressure sensing system includes a sensor housing formed using MEMS processing. The sensor housing has ribs and grooves in both horizontal and vertical directions relative to the surface to allow the membrane to flex in a consistent manner. The flexing of the membrane allows the pedestal to be repeatedly positioned in response to pressure acting on the extension of the sensor head and membrane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.