James Marks
4Patents
4h-index
7Co-inventors
43Inventor score
Filing activity: Jan 29, 1993 → Feb 21, 2003
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5923423A | Heterodyne scatterometer for detecting and analyzing wafer surface defects | Physics | 104 | Expired |
| US6868736B2 | Ultra-miniature optical pressure sensing system | Physics | 81 | Expired |
| US5343179A | Miniaturized solenoid operated trip device | Electricity | 36 | Expired |
| US6597446B2 | Holographic scatterometer for detection and analysis of wafer surface deposits | Physics | 21 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.