Apparatus and method for mass flow controller with a plurality of closed loop control code sets
US6868862B2 · kind B2 · utility
35Cited by
29References
45Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 24, 2002 |
| Grant date | Mar 22, 2005 |
| Priority date | — |
| Expiry date | Jun 24, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7761
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A mass flow controller includes an electronic controller for which a plurality of closed loop control codes sets may be uploaded. In a dual processor embodiment, one processor may upload a plurality of codes sets for another, with the selection of codes sets determined by the uploading processor either autonomously or through user interaction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.