Thin film forming apparatus, film supplier, film cassette, transport mechanism and transport method
US6868888B2 · kind B2 · utility
17Cited by
9References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 11, 2003 |
| Grant date | Mar 22, 2005 |
| Priority date | — |
| Expiry date | Mar 11, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T156/1744
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A center robot is fixed approximately in a central portion of a process part. A coating unit, a drying unit, a transfer unit, a peeling unit, a film supplying unit and a reversing unit are arranged around the center robot. The center robot comprises a hand-for-substrate and a hand-for-film which are allowed to directly access the respective units. Within a process part, the center robot transports a sheet film and/or a substrate between the coating unit, the drying unit, the transfer unit and the film supplying unit, and a thin film is formed on the substrate using the sheet film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.