Transfer of optical element patterns on a same side of a substrate already having a feature thereon
US6869754B2 · kind B2 · utility
0Cited by
7References
31Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 28, 2001 |
| Grant date | Mar 22, 2005 |
| Priority date | — |
| Expiry date | Mar 4, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/0035
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A passive optical element is transferred into a substrate already having features with a vertical dimension thereon. The features may be another passive optical element, an active optical element, a dichroic layer, a dielectric layer, alignment features, metal portions. A protective layer is provided over the feature during the transfer of the optical element. One or more of these processes may be performed on a wafer level.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.