Maintenance information management server maintenance information management system using the same, as well as method of managing maintenance information
US6873999B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 23, 2002 |
| Grant date | Mar 29, 2005 |
| Priority date | — |
| Expiry date | Oct 22, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S707/99948
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A maintenance information management server stores: apparatus information related to apparatus name and apparatus model of semiconductor manufacturing apparatuses for each apparatus code; facility information about semiconductor manufacturing apparatuses installed in each factory/manufacturing line associated with the apparatus code; defect countermeasure information showing a content of a defect associated with the apparatus code; and defect countermeasure information. When defect information related to a semiconductor manufacturing apparatus installed in a factory/manufacturing line and countermeasure information to cope with the defect, as defect countermeasure information, are given, the maintenance information management server registers the defect countermeasure information based on the apparatus code and distributes the defect countermeasure information as maintenance information to all other factories/manufacturing lines having installed therein semiconductor manufacturing apparatuses with an apparatus code identical with that of the semiconductor manufacturing apparatus having the defect.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.