Particle filter for microelectromechanical systems
US6875257B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 20, 2002 |
| Grant date | Apr 5, 2005 |
| Priority date | — |
| Expiry date | Dec 16, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/12674
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A particle filter for microelectromechanical systems is provided that includes a particle trap formed on a substrate material. The particle trap includes an array of multidimensional geometric structures in an adjacent relationship. The geometric structures further define a plurality of multidimensional voids therebetween for trapping particles therein. The individual multidimensional geometric structures are formed by a plurality of vertically interconnected geometric shapes to define different configurations of voids between the adjacent geometric structures. In one embodiment of the filter system, an electrical bias is applied to the array of multidimensional geometric structures to facilitate attracting and trapping of particles in the filter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.