Capacitive finger coupling element on a silicon support for coupling a strip line structure

US6876268B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Thomas Walter · Renningen, DE
• Markus Ulm · Weilmünster, DE
• Stefan Keith · Leonberg, DE
• Dirk Steinbuch · Wimsheim, DE
• Mathias Reimann · Ditzingen, DE

Key dates

• Filing date: May 7, 2002
• Grant date: Apr 5, 2005
• Expiry date: May 7, 2022

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01P1/203
• WIPO field: Telecommunications
• WIPO sector: Electrical engineering

Abstract

A coupling element for an HF strip line structure on an HF substrate, implemented in thin-layer technology as a finger coupler structure on a silicon support is described. The bonding to the strip line tracks of the HF strip line structure is effected via metallizations, in particular in the form of spacers.