Inventor · Weilmünster, DE

Markus Ulm

22Patents
6h-index
33Co-inventors
65Inventor score

Filing activity: Dec 13, 2001 → Jan 6, 2016

Most-cited inventions

PatentTitleAreaCited byStatus
US7449355B2 Anti-stiction technique for electromechanical systems and electromechanical device employing same Electricity 45 Expired
US8020266B2 Method of producing a device Emerging Cross-Sectional Technologies 21 Active
US7414351B2 Energy harvesting device manufactured by print forming processes Emerging Cross-Sectional Technologies 16 Active
US7757555B2 Tri-axis accelerometer having a single proof mass and fully differential output signals Emerging Cross-Sectional Technologies 11 Active
US9003885B2 Tri-axis accelerometer having a single proof mass and fully differential output signals Emerging Cross-Sectional Technologies 9 Active
US7671515B2 Microelectromechanical devices and fabrication methods Electricity 8 Active
US7625773B2 Anti-stiction technique for electromechanical systems and electromechanical device employing same Electricity 6 Active
US7582514B2 Microelectromechanical systems encapsulation process with anti-stiction coating Performing Operations; Transporting 5 Active
US6686810B2 Coplanar waveguide switch Electricity 5 Expired
US7535325B2 Component for impedance change in a coplanar waveguide and method for producing a component Emerging Cross-Sectional Technologies 3 Expired
US7563633B2 Microelectromechanical systems encapsulation process Performing Operations; Transporting 3 Active
US8276446B2 Sensor device Electricity 3 Active
US7898046B2 Microelectromechanical systems encapsulation process Performing Operations; Transporting 2 Active
US7224239B2 Structural element having a coplanar line Electricity 2 Expired
US6882255B2 Device having a capacitor with alterable capacitance, in particular a high-frequency microswitch Electricity 2 Expired
US8418559B2 Tri-axis accelerometer having a single proof mass and fully differential output signals Emerging Cross-Sectional Technologies 2 Active
US9255000B2 CMOS integrated moving-gate transducer with silicon as a functional layer Performing Operations; Transporting 1 Active
US9725298B2 CMOS integrated moving-gate transducer with silicon as a functional layer Performing Operations; Transporting 0 Active
US6762923B2 Coplanar switch Electricity 0 Expired
US7229694B2 Micromechanical component and method for producing an anti-adhesive layer on a micromechanical component Emerging Cross-Sectional Technologies 0 Expired
US6876268B2 Capacitive finger coupling element on a silicon support for coupling a strip line structure Electricity 0 Expired
US8786419B2 Method for controlling a device and a device for controlling the device Performing Operations; Transporting 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.