Micromirrors with asymmetric stopping mechanisms
US6876485B1 · kind B1 · utility
2Cited by
7References
45Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 7, 2003 |
| Grant date | Apr 5, 2005 |
| Priority date | — |
| Expiry date | Nov 7, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/904
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A micromirror device comprises a plurality of stopping mechanisms that sequentially stop the mirror plate of the micromirror device when the micromirror device is rotating towards a state, such as an ON or OFF state. The mirror plate sequentially separates from the stopping mechanisms when the mirror plate is rotating towards another state, such as the OFF or ON state.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.