Lithographic apparatus and device manufacturing method
US6879377B2 · kind B2 · utility
7Cited by
5References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 27, 2002 |
| Grant date | Apr 12, 2005 |
| Priority date | — |
| Expiry date | Mar 9, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70991
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A lithographic projection apparatus includes a conduit that supplies utilities to a movable component in a vacuum chamber such as an object table, associated motor or sensor. The conduit comprises flexible metal bellows preventing out-gassing of the conduit due to the vacuum in the vacuum chamber while allowing movement of the movable component in at least a first degree of freedom.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.