Ink-jet printhead and method of manufacturing the same
US6880916B2 · kind B2 · utility
15Cited by
6References
21Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 26, 2003 |
| Grant date | Apr 19, 2005 |
| Priority date | — |
| Expiry date | Mar 26, 2023 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2/1642
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
An ink-jet printhead and a method of manufacturing the ink-jet printhead include a substrate on which at least one heater and a passivation layer protecting the at least one heater are formed, a passage plate formed on the substrate to provide a chamber corresponding to the at least one heater, and a nozzle plate in which an orifice corresponding to the chamber is formed. The passage plate is formed of photoresist, and the nozzle plate is formed of a silicon-family material at a temperature limited by characteristics of the passage plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.