Patent · US Expired

Apparatus and method for handling, storing and reloading carriers for disk-shaped items, such as semiconductor wafers or CDs

US6881914B2 · kind B2 · utility

0Cited by

5References

11Claims

0Family size

Assignee

Infineon Technologies SC 300 GmbH & Co. KG · DE

Inventors

Michael Lering · Bubenreuth, DE
Reiner Missale · Hemau, DE
Martin Peiter · Dresden, DE

Key dates

Filing date	Nov 18, 2002
Grant date	Apr 19, 2005
Priority date	—
Expiry date	Mar 29, 2023

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S414/137
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

An apparatus for handling, storing and reloading carriers for disk-shaped items, such as semiconductor wafers or CDs, has at least one cleaning unit and at least one storage unit for the carriers containing the disk-shaped items. The apparatus further has at least one sorting unit for the disk-shaped items. The cleaning unit, the storage unit and the sorting apparatus are integral component parts of the apparatus and are operated by a common automatic control.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.