Probe tile for probing semiconductor wafer
US6882168B2 · kind B2 · utility
11Cited by
16References
16Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 23, 2003 |
| Grant date | Apr 19, 2005 |
| Priority date | — |
| Expiry date | Jun 23, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/07364
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A tile used to hold one or more probes for testing a semiconductor wafer. The tile has one or more sites for inserting one or more probes to test the semiconductor wafer. Each site has one or more holes. Each hole is coupled with a slot forming an angle. A probe is inserted into the tile from a top of the tile through the hole and seated on the slot. The probe has a probe tip. The probe tip is in contact with the semiconductor wafer at one end of the slot at a bottom of the tile. The probe tip is aligned with an X and Y coordinates of a bond pad on the semiconductor wafer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.