Electrothermal self-latching MEMS switch and method
US6882264B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 8, 2002 |
| Grant date | Apr 19, 2005 |
| Priority date | — |
| Expiry date | Nov 8, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49222
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Electrothermal Self-Latching MEMS Switch and Method. According to one embodiment, a microscale switch having a movable microcomponent is provided and includes a substrate having a stationary contact. The switch can also include a structural layer having a movable contact positioned for contacting the stationary contact when the structural layer moves toward the substrate. An electrothermal latch attached to the structural layer and having electrical communication with the movable contact to provide current flow between the electrothermal latch and the stationary contact when the movable contact contacts the stationary contact for maintaining the movable contact in contact with the stationary contact.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.