Inventor · Irvine, CA, US

Shawn Jay Cunningham

15Patents
7h-index
6Co-inventors
55Inventor score

Filing activity: Nov 8, 2002 → Oct 25, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US6746891B2 Trilayered beam MEMS device and related methods Emerging Cross-Sectional Technologies 102 Expired
US6876047B2 MEMS device having a trilayered beam and related methods Emerging Cross-Sectional Technologies 97 Expired
US6917086B2 Trilayered beam MEMS device and related methods Emerging Cross-Sectional Technologies 93 Expired
US6882264B2 Electrothermal self-latching MEMS switch and method Emerging Cross-Sectional Technologies 60 Expired
US6847114B2 Micro-scale interconnect device with internal heat spreader and method for fabricating same Emerging Cross-Sectional Technologies 55 Expired
US8264054B2 MEMS device having electrothermal actuation and release and method for fabricating Emerging Cross-Sectional Technologies 12 Expired
US7385800B2 Micro-electro-mechanical system (MEMS) capacitors, inductors, and related systems and methods Electricity 7 Expired
US8319312B2 Devices for fabricating tri-layer beams Performing Operations; Transporting 4 Active
US8420427B2 Methods for implementation of a switching function in a microscale device and for fabrication of a microscale switch Emerging Cross-Sectional Technologies 1 Active
US11615924B2 MEMS switch Electricity 0 Active
US11124410B2 Actuator plate partitioning and control devices and methods Performing Operations; Transporting 0 Active
US8673671B2 Methods and devices for fabricating tri-layer beams Performing Operations; Transporting 0 Active
US10125008B2 Actuator plate partitioning and control devices and methods Performing Operations; Transporting 0 Active
US8059385B2 Substrates with slotted metals and related methods Emerging Cross-Sectional Technologies 0 Active
US10640362B2 Systems, devices, and methods for reducing surface dielectric charging in a RF MEMS actuator element Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.