Sensing head positioning system using two-stage offset air bearings
US6882899B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 15, 2001 |
| Grant date | Apr 19, 2005 |
| Priority date | — |
| Expiry date | May 23, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG09G3/006
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
Methods, apparatuses, and systems are presented for positioning a sensing head relative to a workpiece, involving a control unit operative to provide a plurality of control signals to iteratively control positioning of the sensing head relative to the workpiece, a plurality of air injectors disposed and fixedly connected on a periphery of the sensing head, each of the air injectors capable of being independently controlled to eject a gas between the sensing head and the workpiece to create an air bearing and affect positioning of the sensing head relative to the workpiece in response to at least one of the control signals, and a plurality of sensors providing a plurality of feedback signals to the control unit, the feedback signals containing information relating to positioning of an optical imaging sensing head relative to the workpiece.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.