Acceleration sensor and method for manufacturing an acceleration sensor

US6883381B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Stefan Kolb · Unterschleißheim, DE
• Wolfgang Werner · Hersbruck, DE

Key dates

• Filing date: Jun 4, 2003
• Grant date: Apr 26, 2005
• Expiry date: Jun 4, 2023

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L2924/13091
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An acceleration sensor includes a deflectable pressure measuring diaphragm and a counter-structure, which is deflectable as against the pressure measuring diaphragm. The acceleration sensor includes a detection means for detecting a deflection of the pressure measuring diaphragm as against the counter-structure. Further, a test mass is connected to the pressure measuring diaphragm or the counter-structure in order to be deflected from an idle position depending on an acceleration applied. The deflection of the test mass results in a change of the distance between the pressure measuring diaphragm and the counter-structure, which is detectable by the detection means.