Electron microscope and spectroscopy system
US6885445B2 · kind B2 · utility
10Cited by
5References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 5, 2002 |
| Grant date | Apr 26, 2005 |
| Priority date | — |
| Expiry date | Apr 29, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2808
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An electron microscope 10 is adapted to enable spectroscopic analysis of a sample 16. A parabolic mirror 18 has a central aperture 20 through which the electron beam can pass. The mirror 18 focuses laser illumination from a transverse optical path 24 onto the sample, and collects Raman and/or other scattered light, passing it back to an optical system 30. The mirror 18 is retractable (within the vacuum of the electron microscope) by a sliding arm assembly 22.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.