Method, apparatus, and computer program of searching for clustering faults in semiconductor device manufacturing
US6885950B2 · kind B2 · utility
17Cited by
9References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 20, 2001 |
| Grant date | Apr 26, 2005 |
| Priority date | — |
| Expiry date | Jan 15, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/014
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method of searching for clustering faults is employed for semiconductor device manufacturing, The method enters data on faults present in a search target, calculates a frequency distribution of the faults in unit cells divided from the search target, approximates the frequency distribution by overlaying at least two discrete distribution functions, and searches for clustering faults according to weights of the discrete distribution functions on the frequency distribution.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.