Segmented pallet for disk-shaped substrate electrical biassing and apparatus comprising same
US6886244B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 7, 2002 |
| Grant date | May 3, 2005 |
| Priority date | — |
| Expiry date | Feb 18, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/53265
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An apparatus for performing treatments to the surface of disk-shaped workpieces/substrates, as in the manufacture of multi-layer, thin-film recording media. The apparatus includes treatment stations for performing treatments to a surface of each of the disk-shaped workpieces/substrates; a pallet adapted for mounting the disk-shaped workpieces/substrates, a plurality of bias potential sources; and a transporting source to transport the pallet past the treatment stations. The pallet includes electrically conductive segments and each segment is electrically insulated from other segments; is adapted to mount and expose at lest one surface of a disk-shaped workpiece; and includes an electrical contact for providing electrical contact with the bias potential source of the apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.