Punching apparatus for backing-films of CMP machines and preventive maintenance method for the same
US6886442B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 8, 2002 |
| Grant date | May 3, 2005 |
| Priority date | — |
| Expiry date | Nov 2, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T83/944
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
An apparatus for punching CMP machine backing film. The apparatus comprises a base, a first plate, and a second plate. The base holds the backing-film. The first plate is disposed on the base in a manner such that it moves between a first position and a second position. The first plate abuts the backing-film when it is located at the second position. The second plate, having a plurality of punches, is disposed on the base in a manner such that it moves between a third position and a fourth position. The first plate is located at the first position when the second plate is located at the third position. The first plate is located at the second position when the second plate is located at the fourth position so that the punches pass through the first plate to punch the backing-film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.