Instrument and method for observing selected stored images acquired from a scanning charged-particle beam
US6888137B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 14, 2000 |
| Grant date | May 3, 2005 |
| Priority date | — |
| Expiry date | Oct 3, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/22
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
There is disclosed a scanning electron charged-particle beam instrument facilitating a search for a desired field of view on a specimen. Also, a method of observing a specimen image with this instrument is disclosed. In field of view search mode, low-magnification images are gained from plural regions on the specimen. The image signals gained from the regions are sent to corresponding image memories and stored there. At the same time, the X and Y coordinates of the specimen at the low magnification are stored. If the image is rotated, the angular position and the direction are simultaneously stored. The image signals stored in the image memories are supplied to a CRT, and plural specimen images are displayed on the CRT. If a human operator selects a desired one out of the displayed images, a control unit controls a stage control unit according to coordinates read out, driving an X-Y translation stage. The stage is moved to bring a specimen position corresponding to the selected image onto the optical axis of the electron beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.