System and method for fingerprinting of semiconductor processing tools
US6889149B2 · kind B2 · utility
1Cited by
11References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 25, 2003 |
| Grant date | May 3, 2005 |
| Priority date | — |
| Expiry date | May 4, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67276
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A system and method is used for measuring the performance of semiconductor processing tools. A software component may be used to define a set of performance variables and associate performance limits. From the set of performance variables, a set of variables may be selected to create a customized test for a particular tool. The system may be used to store the results of the tests within the system for fast comparison with the associated performance limits, with previous test results, or both. The system may be used to display an overall status of groups of performance variables.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.