Caching of intra-layer calculations for rapid rigorous coupled-wave analyses
US6891626B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 25, 2001 |
| Grant date | May 10, 2005 |
| Priority date | — |
| Expiry date | Dec 21, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/2441
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A library of simulated-diffraction signals for an integrated circuit periodic grating is generated by generating gets of intermediate layer data. Each set of intermediate layer data corresponding to a separate one of a plurality of hypothetical layers of a hypothetical profile of the periodic grating. Each separate hypothetical layer has one of a plurality of possible combinations of hypothetical values of properties for that hypothetical layer. The generated sets of intermediate layer data are stored. Simulated-diffraction signals for each of a plurality of hypothetical profiles are generated based on the stored generated sets of intermediate layer data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.