Reducing offset in accelerometers
US6892576B2 · kind B2 · utility
33Cited by
7References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 18, 2003 |
| Grant date | May 17, 2005 |
| Priority date | — |
| Expiry date | Jul 18, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T74/1293
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Accelerometer offset is reduced by forming mass support structures within an inner periphery of the mass, affixing the mass support structures to the substrate by at least one anchor positioned near the mass' center of mass, and affixing the sensing fingers proximate to the anchor. The mass support structures can be affixed to the substrate using a single anchor or multiple anchors that are positioned close together. The sensing fingers can be affixed to the substrate or to the mass support structures. The mass is typically suspended from within its periphery but toward its outer periphery.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.