Method for operating a positioning apparatus, and scanning microscope
US6894271B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 4, 2002 |
| Grant date | May 17, 2005 |
| Priority date | — |
| Expiry date | Dec 28, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/0056
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for operating a positioning apparatus that moves a positioning element comprises the steps of: generating a first and at least one further reference signal, the first reference signal corresponding to a first reference position and the further reference signal to a further reference position; generating a first and at least one further estimated value for the present position of the positioning drive; transferring the first reference signal and the estimated value to the positioning apparatus; establishing the first reference position using the positioning apparatus, and measuring the present position and generating a position signal that corresponds to the measured present position; transferring the further reference signal to the positioning apparatus; generating a further estimated value of the positioning drive position; transferring the further estimated value to the positioning apparatus; establishing the further reference position, and measuring a further present position and generating a further position signal that corresponds to the measured further present position; and cyclically repeating the steps at constant time intervals.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.