Method and device for rastering source redundancy
US6894435B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 6, 2002 |
| Grant date | May 17, 2005 |
| Priority date | — |
| Expiry date | Nov 6, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31774
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method for scanning a specimen 105 with beams 102 of charged particles of a source group. Thereby, a plurality of target points 402 is scanned with a charged particle beam emitted by a source 106 and the same plurality of target points is scanned with at least one further charged particle beam emitted by at least one further source. Further, the charged particle beams from the source and the at least one further source are emitted on the same target point at different times. Additionally, a multiple charged particle beam source and a data feed system are provided. A source array 104 comprises at least one logical emitting unit 106, wherein patterning information is shifted in a shift circuit 140, and redundancy emitting units 106, wherein individual redundancy emitting units obtain patterning information from the shift register.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.