Contact hole standard test device
US6897440B1 · kind B1 · utility
13Cited by
36References
27Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 30, 1999 |
| Grant date | May 24, 2005 |
| Priority date | — |
| Expiry date | Nov 30, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24331
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A standard test device used for testing a hole of a semiconductor device includes a dummy film on a base surface, and an insulating layer which has an opening penetrating through the insulating layer, so that a part of a top surface of the dummy film is shown through the opening, wherein the dummy film has a predetermined constant thickness around the opening. The standard test device makes it easily possible to measure a thickness of a residual film on the bottom or the contact hole.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.