Semiconductor manufacturing apparatus and its diagnosis apparatus and operating system
US6901306B2 · kind B2 · utility
4Cited by
4References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 27, 2002 |
| Grant date | May 31, 2005 |
| Priority date | — |
| Expiry date | Feb 27, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/80
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A semiconductor manufacturing apparatus allows the user to accurately determine the state of the apparatus and the cause of an abnormal condition for a short time. The apparatus includes a main unit for processing raw materials and forming a semiconductor, recording means for recording information of an operation to be executed by the main unit as predetermined data, operating means for operating the operation of said main unit and simulating the operation by using the predetermined data, and display means located remotely from the main unit and for displaying the simulated result.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.