Method of processing substrates with integrated weighing steps
US6902647B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 29, 2002 |
| Grant date | Jun 7, 2005 |
| Priority date | — |
| Expiry date | Sep 29, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02282
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An apparatus for processing substrates comprises a substrate handling chamber, including a substrate handling robot for transferring substrates from cassettes into a substrate carrier. A processing chamber is provided adjacent to the handling chamber, including one or more furnaces adapted to process a plurality of the substrates supported in the carrier. A weighing device is accessible to the substrate handler. The weighing device is adapted to weigh the substrates before and after processing the substrates in the processing chamber. The illustrated process is a curing anneal for a low k polymer previously deposited on the substrates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.