Patent · US Expired

Semiconductor device, method of making the same and liquid crystal display device

US6903372B1 · kind B1 · utility

12Cited by
4References
6Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 30, 2000
Grant dateJun 7, 2005
Priority date
Expiry dateSep 30, 2021

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D86/0251
  • WIPO fieldAudio-visual technology
  • WIPO sectorElectrical engineering

Abstract

To provide TFT of improved low-temperature polycrystalline layer that has higher electron mobility and assures less fluctuation in manufacture in view of realizing a liquid-crystal display device having a large display area by utilizing a glass substrate.A TFT having higher electron mobility can be realized within the predetermined range of characteristic fluctuation by utilizing the semiconductor thin-film (called quasi single crystal thin-film) formed of poly-crystal grain joined with the {111} twin-boundary of Diamond structure as the channel region (namely, active region) of TFT.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.