Interdigital capacitor having a cutting target portion
US6903402B2 · kind B2 · utility
96Cited by
1References
24Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 26, 2003 |
| Grant date | Jun 7, 2005 |
| Priority date | — |
| Expiry date | Mar 26, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An interdigital capacitor includes a semiconductor substrate, and a pair of comb-like electrodes formed on the semiconductor substrate. At least one of the pair of comb-like electrodes includes a cutting target portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.