Piezoelectric element, actuator, and inkjet head
US6903491B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 23, 2002 |
| Grant date | Jun 7, 2005 |
| Priority date | — |
| Expiry date | Jun 12, 2022 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2002/14491
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A piezoelectric element includes: a piezoelectric film made of PZT; a pair of electrodes (a lower electrode and an upper electrode) arranged with the piezoelectric film being interposed therebetween; and a base film made of PLT having a thickness of about 50 nm to 200 nm and provided between the piezoelectric film and the lower electrode. The piezoelectric element, as a whole, is provided on a substrate, which may be a stainless steel substrate (polycrystalline), a heat-resistant glass substrate (amorphous), a silicon substrate (single crystal), etc. A piezoelectric element having a good piezoelectric characteristic can be provided on a substrate other than a single crystal substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.