Cylindrical magnetron target and spindle apparatus
US6905579B2 · kind B2 · utility
2Cited by
5References
16Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 13, 2003 |
| Grant date | Jun 14, 2005 |
| Priority date | — |
| Expiry date | Feb 13, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3405
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A cylindrical magnetron target and spindle attachment apparatus for affixing a cylindrical magnetron target to a rotatable support spindle. The attachment apparatus includes a target and a spindle. The target defines a receiving portion. The spindle has a spindle plug. The spindle plug is disposed within the receiving portion of the target. The attachment apparatus increases the speed and ease of removing and installing cylindrical rotating targets onto a support spindle.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.